A solution to a specific problem (B penetration) that arrived after the industry moved to a different solution (metal gates). Still valuable in specialized analog/MEMS contexts.
Given the semiconductor context, this review assumes you are referring to for use in MOS transistor gates, MEMS, or resistive heaters. If you meant a specific commercial product or a different field (e.g., polymer science), please clarify; however, Ga-doped poly-Si is the most plausible "deep review" topic. Deep Review: Gallium-Doped Polysilicon (G+ Poly) 1. Introduction & Motivation Polysilicon is the standard gate electrode material in CMOS and MEMS. Conventionally, it is doped n-type (Phosphorus, As) or p-type (Boron). Gallium (Ga), a Group III element, is an alternative p-type dopant. g+ poly